We present the characterization of two-dimensionally arranged 64-pixel NbTiNsuperconducting nanowire single-photon detector array for spatially resolvedphoton detection. NbTiN films deposited on thermally oxidized Si substratesenabled the high-yield production of high-quality SSPD pixels, and all 64 SSPDpixels showed uniform superconducting characteristics. Furthermore, all of thepixels showed single-photon sensitivity, and 60 of the 64 pixels showed a pulsegeneration probability higher than 90% after photon absorption. As a result oflight irradiation from the single-mode optical fiber at different distancesbetween the fiber tip and the active area, the variations of system detectionefficiency in each pixel showed reasonable Gaussian distribution to representthe spatial distributions of photon flux intensity.
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